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Proceedings Paper

Energy coupling to materials ablated by intensive pulsed 1-um radiation: plasma shielding and surface-modification effects
Author(s): Vitali I. Konov; Serge V. Garnov; Sergei M. Klimentov; Taras V. Kononenko; O. G. Tsarkova; Friedrich Dausinger
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Paper Abstract

Optical transmission and reflectivity of ceramics and CVD diamond plates prior, in the process and after ablation by intensive nano- and picosecond pulses of Nd:YAG and Nd:YAP lasers are investigated. Laser induced surface layer modification effects and plasma influence are considered. Correlation between crater depth and plasma optical properties was found. The mechanisms of crater walls influence on plasma are discussed.

Paper Details

Date Published: 3 June 1998
PDF: 9 pages
Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309505
Show Author Affiliations
Vitali I. Konov, General Physics Institute (Russia)
Serge V. Garnov, General Physics Institute (Russia)
Sergei M. Klimentov, General Physics Institute (Russia)
Taras V. Kononenko, General Physics Institute (Russia)
O. G. Tsarkova, General Physics Institute (Russia)
Friedrich Dausinger, Univ. of Stuttgart (Germany)

Published in SPIE Proceedings Vol. 3274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing III
Jan J. Dubowski; Peter E. Dyer, Editor(s)

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