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Proceedings Paper

Transition from laboratory to manufacturing for a dry laser-assisted cleaning technology
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Paper Abstract

A photon flux from a laser can provide an alternative method to clean and prepare industrial surfaces. The laser-based cleaning method presented in this paper uses only photons coupled with a laminar, flowing gas which is inert to the surface. This method can eliminate or reduce the water and chemical volumes used in industrial applications. In this paper, the development issues bringing a technology into the mainstream are discussed.

Paper Details

Date Published: 3 June 1998
PDF: 10 pages
Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309499
Show Author Affiliations
Audrey C. Engelsberg, Radiance Services Co. (United States)


Published in SPIE Proceedings Vol. 3274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing III
Jan J. Dubowski; Peter E. Dyer, Editor(s)

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