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Proceedings Paper

Vibration measurement by atomic force microscopy with laser readout
Author(s): Valentinas J. Snitka; Vida Mizariene; Margiris Kalinauskas; Paulius Lucinskas
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Paper Abstract

Micromachined cantilever beams are widely used for different microengineering and nanotechnology actuators and sensors applications. The micromechanical cantilever tip-based data storage devices with reading real data at the rates exceeding 1Mbit/s have been demonstrated. The vibrational noise spectrum of a cantilever limits the data storage resolution. Therefore the possibility to measure the microvibrations and acoustic fields in different micromachined devices are of great interest. We describe a method to study a micromechanical cantilever and surface vibrations based on laser beam deflection measurements. The influence of piezoelectric plate vibrations and the tip- surface contact condition on the cantilever vibrations were investigated in the frequency range of 1-200 kHz. The experiments were performed using the measurement results. The V-shaped cantilevers exited by the normal vibrations due to the non-linearity at the tip-surface contact vibrates with a complex motion and has a lateral vibration mode coupled with normal vibration mode. The possibility to use laser deflection technique for the vibration measurements in micromachined structures with nano resolution is shown.

Paper Details

Date Published: 1 June 1998
PDF: 5 pages
Proc. SPIE 3411, Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (1 June 1998); doi: 10.1117/12.307752
Show Author Affiliations
Valentinas J. Snitka, Kaunas Univ. of Technology (Lithuania)
Vida Mizariene, Kaunas Univ. of Technology (Lithuania)
Margiris Kalinauskas, Kaunas Univ. of Technology (Lithuania)
Paulius Lucinskas, Kaunas Univ. of Technology (Lithuania)

Published in SPIE Proceedings Vol. 3411:
Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

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