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Proceedings Paper

Defect study in fused silica using near-field scanning optical microscopy
Author(s): Ming Yan; Li Wang; Wigbert J. Siekhaus; Mark R. Kozlowski; T. Jason Yang; Umar Mohideen
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Paper Abstract

Surface defects in fused silica have been characterized using Near Field Scanning Optical Microscopy (NSOM). Using total internal reflection of a p- or s-polarized laser beam, optical scattering from defects located on the surface itself as well as in the subsurface layer of polished fused silica has been measured by NSOM. The local scattering intensity has been compared with simultaneously measured surface topography. In addition, surface defects intentionally created on a fused silica surface by nano-indentation have been used to establish a correlation between optical scattering of s- and p-polarized light, surface morphology and the well known subsurface stress-field associated with nano-indentation.

Paper Details

Date Published: 20 April 1998
PDF: 4 pages
Proc. SPIE 3244, Laser-Induced Damage in Optical Materials: 1997, (20 April 1998); doi: 10.1117/12.307032
Show Author Affiliations
Ming Yan, Lawrence Livermore National Lab. (United States)
Li Wang, Lawrence Livermore National Lab. (United States)
Wigbert J. Siekhaus, Lawrence Livermore National Lab. (United States)
Mark R. Kozlowski, Lawrence Livermore National Lab. (United States)
T. Jason Yang, Univ. of California/Riverside (United States)
Umar Mohideen, Univ. of California/Riverside (United States)

Published in SPIE Proceedings Vol. 3244:
Laser-Induced Damage in Optical Materials: 1997
Gregory J. Exarhos; Arthur H. Guenther; Mark R. Kozlowski; M. J. Soileau, Editor(s)

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