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Proceedings Paper

New single-mode optical waveguide on ceramic substrate utilizing siloxane polymer
Author(s): Yuriko Ueno; Katsuhiro Kaneko; Shigeo Tanahashi
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Paper Abstract

A new single-mode optical waveguide on a ceramic substrate has been developed to obtain opto-electronic multichip modules for use of high operating frequencies. Propagation loss of the single-mode optical waveguide formed on ceramic substrate is 0.14dB/cm for 1.3 micrometers wavelength.It is fabricated utilizing a siloxane polymer. The film of siloxane polymer can cut-off surface roughness of ceramic substrate. So the optical waveguide on ceramic substrate utilizing the siloxane polymer has fine optical characteristics.

Paper Details

Date Published: 20 April 1998
PDF: 9 pages
Proc. SPIE 3289, Micro-Optics Integration and Assemblies, (20 April 1998);
Show Author Affiliations
Yuriko Ueno, Kyocera Corp. (Japan)
Katsuhiro Kaneko, Kyocera Corp. (Japan)
Shigeo Tanahashi, Kyocera Corp. (Japan)

Published in SPIE Proceedings Vol. 3289:
Micro-Optics Integration and Assemblies
Michael R. Feldman; Yung-Cheng Lee, Editor(s)

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