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Proceedings Paper

Combined photonics and MEMS function demonstration
Author(s): Olga Blum-Spahn; Mial E. Warren; Hong Q. Hou; Richard Franklin Carson; Kent D. Choquette; M. Steven Rodgers; Jeffry J. Sniegowski
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Paper Abstract

We discuss tow examples of integration of micro- electromechanical system (MEMs) and a photonic device. In the first instance, a MEMs locking device pin is driven by a voltage generated by photovoltaic cells connected in series, which are driven by a laser. In the second case, a VCSEL emitting at 1.06 micrometers is packaged together with a metallized MEMs shutter. By appropriate alignment to the opening in the shutter, the VCSEL is turned on and off by the movement of the Si chopper wheel.

Paper Details

Date Published: 20 April 1998
PDF: 5 pages
Proc. SPIE 3286, Vertical-Cavity Surface-Emitting Lasers II, (20 April 1998); doi: 10.1117/12.305469
Show Author Affiliations
Olga Blum-Spahn, Sandia National Labs. (United States)
Mial E. Warren, Sandia National Labs. (United States)
Hong Q. Hou, Sandia National Labs. (United States)
Richard Franklin Carson, MicroOptical Devices, Inc. (United States)
Kent D. Choquette, Sandia National Labs. (United States)
M. Steven Rodgers, Sandia National Labs. (United States)
Jeffry J. Sniegowski, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 3286:
Vertical-Cavity Surface-Emitting Lasers II
Kent D. Choquette; Robert A. Morgan, Editor(s)

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