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Proceedings Paper

Vertical-cavity surface-emitting lasers fabricated using a sealing of AlAs against wet oxidation
Author(s): Dae-Ho Lim; Gye Mo Yang; Jong Hee Kim; Kee Young Lim; Hyung Jae Lee
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Paper Abstract

We have studied the process of sealing on exposed. AlAs and the wet oxidation behavior of AlAs to prevent further wet oxidation. A critical processing step consists of the formation of an oxide surface barrier by the first set oxidation for a short time at 390-430 degrees C in the stream environment of previously room-ambient exposed AlAs surface. During this brief wet oxidation,a dense oxide barrier with a thickness of approximately 1 micrometers is formed, which further blocks diffusing oxygen species during the second wet oxidation. The oxide surface barriers of approximately 1 micrometers thickness formed at 408 degrees C and 410 degrees C have shown the best effectiveness of sealing against further wet oxidation. The effectiveness of the sealing is demonstrated through its use as a mask against wet oxidation in the fabrication of oxide-confirmed vertical-cavity surface-emitting lasers.

Paper Details

Date Published: 20 April 1998
PDF: 7 pages
Proc. SPIE 3286, Vertical-Cavity Surface-Emitting Lasers II, (20 April 1998); doi: 10.1117/12.305450
Show Author Affiliations
Dae-Ho Lim, Chonbuk National Univ. (South Korea)
Gye Mo Yang, Chonbuk National Univ. (South Korea)
Jong Hee Kim, Chonbuk National Univ. (South Korea)
Kee Young Lim, Chonbuk National Univ. (South Korea)
Hyung Jae Lee, Chonbuk National Univ. (South Korea)

Published in SPIE Proceedings Vol. 3286:
Vertical-Cavity Surface-Emitting Lasers II
Kent D. Choquette; Robert A. Morgan, Editor(s)

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