Share Email Print
cover

Proceedings Paper

Photoresist microparabolas for beam steering
Author(s): Samuel K. Rotich; Jim G. Smith; Alan G. R. Evans; Arthur Brunnschweiler
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A simple grating mask has been used in an ordinary 5:1 projection stepper equipment to fabricate microscopic parabolic topographies in thick positive photoresist. The microparabolic surfaces created were coated with reflective material to form parabolic reflectors. Measurement values of focal length were in agreement with the expected theoretical values. The simple parabola forms the basis for the fabrication of compound parabolic reflector which can be used for beam steering. Normal incidence beam can be redirected by the compound parabolic reflector onto device areas in the vicinity of the focus.

Paper Details

Date Published: 8 April 1998
PDF: 8 pages
Proc. SPIE 3287, Photodetectors: Materials and Devices III, (8 April 1998); doi: 10.1117/12.304502
Show Author Affiliations
Samuel K. Rotich, Univ. of Southampton (Kenya)
Jim G. Smith, Univ. of Southampton (United Kingdom)
Alan G. R. Evans, Univ. of Southampton (United Kingdom)
Arthur Brunnschweiler, Univ. of Southampton (United Kingdom)


Published in SPIE Proceedings Vol. 3287:
Photodetectors: Materials and Devices III
Gail J. Brown, Editor(s)

© SPIE. Terms of Use
Back to Top