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Proceedings Paper

Scanning auger microscopy characterization of magnetic hard disks
Author(s): Jeffrey R. Kingsley; David W. Harris; D. L. Neiman; Jingyu Huang
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Paper Abstract

Applications of ZalarTM rotation and field emission Auger analysis in various magnetic hard disc problems will be presented. These applications include thin layer structure characterization, low concentration contaminant (0.1 - 0.5 atomic percent) detection at deeper interfaces (greater than 1000 angstroms), and small particle (approximately 1000 angstroms) contaminant identification.

Paper Details

Date Published: 1 April 1998
PDF: 6 pages
Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); doi: 10.1117/12.304400
Show Author Affiliations
Jeffrey R. Kingsley, Charles Evans & Associates (United States)
David W. Harris, Charles Evans & Associates (United States)
D. L. Neiman, Hewlett-Packard Co. (United States)
Jingyu Huang, Charles Evans & Associates (United States)


Published in SPIE Proceedings Vol. 3275:
Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II
John C. Stover, Editor(s)

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