Proceedings Paper
MOEMS: a new European competence center--core competencies, additional technologies, and industrial objectives| Format | Member Price | Non-Member Price |
|---|---|---|
| $17.00 | $21.00 |
Paper Abstract
We give a quick overview of what and where in Europe new MOEMS technologies and products are arriving. We will mainly focus on developments funded by the European Community and especially on Europractice II partners existing products and technologies and particularly on the Competence Center Number 3 whose LETI and the authors are the coordinator.
Paper Details
Date Published: 15 March 1998
PDF: 9 pages
Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); doi: 10.1117/12.302394
Published in SPIE Proceedings Vol. 3276:
Miniaturized Systems with Micro-Optics and Micromechanics III
M. Edward Motamedi; Rolf Goering, Editor(s)
PDF: 9 pages
Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); doi: 10.1117/12.302394
Show Author Affiliations
Jean Frederic Clerc, LETI-CEA (France)
Patrick Louis Mottier, LETI-CEA (France)
Published in SPIE Proceedings Vol. 3276:
Miniaturized Systems with Micro-Optics and Micromechanics III
M. Edward Motamedi; Rolf Goering, Editor(s)
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