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Proceedings Paper

Application of micro- and nanotechnologies for the fabrication of optical devices
Author(s): Wolfgang Ehrfeld; Hans-Dieter Bauer
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Paper Abstract

The development of micro-opto-electro-mechanical systems (MOEMS) and devices no longer focuses on feasibility studies and expensive demonstrators. On the contrary, fabrication of micro-optical components is already feeding dynamic markets with a large variety of products that are more or less on the verge of inexpensive mass production. A major application area for MOEMS is, without any doubt, tele- and datacommunications, while miniature optical sensors (e.g. spectrometers and interferometers) have a growing part in many kinds of biotechnological, chemical and pharmaceutical applications. In this presentation numerous examples for optical microstructures are given that range from the field of low cost fiberoptic components to polymer waveguide elements, from fiber switches to mass-producible microlenses made of thermoplastics or glass, and from microstructured photonic bandgap materials to optical sensor tips for investigating nanostructures. It is emphasized that for realizing MOEMS very different materials have to be processed while the necessary hybrid integration demands for specific automated assembly methods. In particular, the examples given show now microtechnologies can be adapted and combined with each other to take into account the special requirements of the product.

Paper Details

Date Published: 15 March 1998
PDF: 13 pages
Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); doi: 10.1117/12.302388
Show Author Affiliations
Wolfgang Ehrfeld, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Hans-Dieter Bauer, Institut fuer Mikrotechnik Mainz GmbH (Germany)

Published in SPIE Proceedings Vol. 3276:
Miniaturized Systems with Micro-Optics and Micromechanics III
M. Edward Motamedi; Rolf Goering, Editor(s)

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