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Proceedings Paper

Automatic test equipment for the micromirror array
Author(s): Hoseong Kim; Kwangwoo Cho; Yong-Kweon Kim; Jong-Woo Shin; Hyungjae Shin; Jae-Ho Moon
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Paper Abstract

Test equipment for the development and mass production of micromirror array have been devised. Test equipment for the static and dynamic response of a single micromirror consists of HeNe laser, lenses, XY stage, CCD camera, position- sensitive photodiode and PC. It can be used to measure reflectance, tilt angle--input voltage relation, response time and resonant frequency, in the developing stage. It can also check the lifetime and uniformity of mirror quality over the wafer. Test equipment for the evaluation of micromirror array consists of CCD camera, lenses, XY stage, video signal processor and PC. It can classify the error- state of micromirror, generate statistical data and map of the position of abnormal micromirrors. The test results are shown on the monitor as a map that shows the error state, position and statistical data. It takes about 90 seconds to evaluate 50 X 50 micromirror array.

Paper Details

Date Published: 15 March 1998
PDF: 8 pages
Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); doi: 10.1117/12.302387
Show Author Affiliations
Hoseong Kim, Chung-Ang Univ. (South Korea)
Kwangwoo Cho, Chung-Ang Univ. (South Korea)
Yong-Kweon Kim, Seoul National Univ. (South Korea)
Jong-Woo Shin, Seoul National Univ. (South Korea)
Hyungjae Shin, Samsung Electronics Co., Ltd. (South Korea)
Jae-Ho Moon, Samsung Electronics Co., Ltd. (South Korea)

Published in SPIE Proceedings Vol. 3276:
Miniaturized Systems with Micro-Optics and Micromechanics III
M. Edward Motamedi; Rolf Goering, Editor(s)

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