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Proceedings Paper

Vibration signature analysis sensors for predictive diagnostics
Author(s): Eric Peeters; Jingkuang Chen; Joel A. Kubby; Olivera Vitomirov
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Paper Abstract

This paper describes frequency vibration sensors for signature analysis on (electro)mechanical components. The application is predictive diagnostics and condition based maintenance on Xerographic printer and copier products. The vibration signature analysis (VSA) sensing devices consist of micromachined arrays of closely spaced silicon mechanical resonators covering a frequency range of 120 Hz to 100 kHz. Resonance of a particular element is detected with a Wheatstone bridge of implanted piezoresistors and the bridge outputs are multiplexed onto a common output line using on- chip p-MOS transistor switches. The design and fabrication of the VSA devices is presented.

Paper Details

Date Published: 5 September 1997
PDF: 11 pages
Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997);
Show Author Affiliations
Eric Peeters, Xerox Palo Alto research Ctr. (United States)
Jingkuang Chen, Xerox Wilson Ctr. for Research and Technology (United States)
Joel A. Kubby, Xerox Wilson Ctr. for Research and Technology (United States)
Olivera Vitomirov, Xerox Wilson Ctr. for Research and Technology (United States)

Published in SPIE Proceedings Vol. 3224:
Micromachined Devices and Components III
Kevin H. Chau; Patrick J. French, Editor(s)

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