Proceedings Paper
Optical and masking properties of vacuum photoresists based on benzo[a]phenoxazine derivatives| Format | Member Price | Non-Member Price |
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Paper Abstract
The influence of film chemical structure and surface modification with P+ ions on optical and masking properties of vacuum-deposited dye films based on benzo[a]phenoxazine derivatives were investigated. Relationship of implantation conditions, surface chemical structure, modified layer thickness and film optical properties was studied. The drastic change of film optical and masking properties in the result of ion implantation is caused by the formation of surface modified layer.
Paper Details
Date Published: 1 January 1998
PDF: 10 pages
Proc. SPIE 3347, Optical Information Science and Technology (OIST97): Optical Recording Mechanisms and Media, (1 January 1998); doi: 10.1117/12.301422
Published in SPIE Proceedings Vol. 3347:
Optical Information Science and Technology (OIST97): Optical Recording Mechanisms and Media
Andrei L. Mikaelian, Editor(s)
PDF: 10 pages
Proc. SPIE 3347, Optical Information Science and Technology (OIST97): Optical Recording Mechanisms and Media, (1 January 1998); doi: 10.1117/12.301422
Show Author Affiliations
Vladimir Enokovich Agabekov, Institute of Physical Organic Chemistry (Belarus)
Olga Evgenyevna Ignasheva, Institute of Physical Organic Chemistry (Belarus)
Published in SPIE Proceedings Vol. 3347:
Optical Information Science and Technology (OIST97): Optical Recording Mechanisms and Media
Andrei L. Mikaelian, Editor(s)
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