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Proceedings Paper

Surface properties of polyimide layers used in microelectronics
Author(s): Jerzy Borycki; Malgorzata Okulska-Bozek
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Paper Abstract

Dozens of poly(amic acids) from selected aromatic diamines and dianhydrides were prepared in the first step of the classical two-step polycondensation. Polyimide layers on different surfaces were obtained by the poly(amic acids) imidization. Some of mechanical properties of these layers were tested. Some correlations between these properties and chemical structure of them wee noticed and discussed.

Paper Details

Date Published: 1 January 1998
PDF: 4 pages
Proc. SPIE 3319, Liquid Crystals: Chemistry and Structure, (1 January 1998);
Show Author Affiliations
Jerzy Borycki, Radom Technical Univ. (Poland)
Malgorzata Okulska-Bozek, Radom Technical Univ. (Poland)

Published in SPIE Proceedings Vol. 3319:
Liquid Crystals: Chemistry and Structure
Marzena Tykarska; Roman S. Dabrowski; Jerzy Zielinski, Editor(s)

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