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Proceedings Paper

Preparation of TiO2 nanoparticle thin film with sol-gel process
Author(s): Jun Shen; Zhinong Weng; Yulong Zhang; Zhongsheng Deng; Tianhe Yang; Jue Wang; Lingyan Chen
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Paper Abstract

TiO2 nanoparticle thin films are fabricated via sol-gel process followed by dip and spin coating technique, using Ti(OC4H9)4 as raw material. A complexing agent is used in order to form a stable sol. Experiments show that the colloidal particles in the sols are relatively large under basic catalyst conditions, while under acidic conditions, the colloidal particles are only about several nanometers. The properties and structures of the films are studied. The films are normally homogenous and crack-free. TEM shows that the films are composed of nanoparticles with a certain porosity. Under the thermal treatment of 80 degrees Celsius, the porosity and thickness of the film decrease while the refractive index increases from the original 1.70 to the final 1.89. When the temperature of the thermal treatment goes up, the size of the nanoparticles increases and crystallization occurs.

Paper Details

Date Published: 20 February 1998
PDF: 4 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300677
Show Author Affiliations
Jun Shen, Tongji Univ. (China)
Zhinong Weng, Tongji Univ. (China)
Yulong Zhang, Tongji Univ. (China)
Zhongsheng Deng, Tongji Univ. (China)
Tianhe Yang, Tongji Univ. (China)
Jue Wang, Tongji Univ. (China)
Lingyan Chen, Tongji Univ. (China)

Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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