A technique of ultrasonic surface pretreatment in diamond powder slurry to enhance diamond nucleation has been developed. Under appropriate pretreatment and growth conditions, diamond grain densities of approximately 10¹⁰ cm^-2 have been obtained on fused silica substrates. The synthesis technique of ultrathin diamond film on fused silica substrates by a hot filament chemical vapor deposition was studied, and high quality ultrathin diamond films with smooth surface were obtained. The optical transmittance of the film with a thickness of approximately 0.3 micrometer on fused silica substrate reached as high as 68% at wavelength of 800 nm.

Date Published: 20 February 1998
PDF: 4 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300666

Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)