Photoreflectance (PR) spectroscopy system is combined with molecular beam epitaxy (MBE) to accomplish in-situ PR measuring of the Si surface (delta) doping on GaAs (001) with different concentrations at different temperatures. The features observed on the high-energy side of the fundamental gap are attributed to transitions involving electronic subbands in the half V-shaped potential well. We find that the Si (delta) -doping-related spectral structure first shifts to high energy side with the doping concentration increasing, then almost stop shifting with the doping concentration higher than 2.4 X 10¹⁴ cm^-2 when temperature increases, at certain doping concentration the Si (delta) - doping-related transition shifts toward low energy side. The dependence of the transition on doping concentration is well explained by using a simple theoretical model.

Date Published: 20 February 1998
PDF: 3 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300663

Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)