Proceedings Paper
Characteristic of surface layer of periodic segment proton-exchanged and annealed LiTaO3| Format | Member Price | Non-Member Price |
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Paper Abstract
Proton-exchanged and annealed film in z-cut LiTaO3 with and without the periodic segment are fabricated. The refractive index, lattice constant, proton concentration, and infrared absorption spectrum of samples are measured by prism coupling, x-ray rocking, SIMS, and spectrometer, respectively. The refractive index increase and the change in lattice constant of the surface layer are noticed during the annealed process.
Paper Details
Date Published: 20 February 1998
PDF: 4 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300653
Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)
PDF: 4 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300653
Show Author Affiliations
Yushan Li, Changchun Institute of Physics (China)
Shaojie Ma, Changchun Institute of Physics (China)
Shaojie Ma, Changchun Institute of Physics (China)
Kunio Tada, Univ. of Tokyo (Japan)
Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)
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