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Proceedings Paper

Characteristic of surface layer of periodic segment proton-exchanged and annealed LiTaO3
Author(s): Yushan Li; Shaojie Ma; Kunio Tada
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Paper Abstract

Proton-exchanged and annealed film in z-cut LiTaO3 with and without the periodic segment are fabricated. The refractive index, lattice constant, proton concentration, and infrared absorption spectrum of samples are measured by prism coupling, x-ray rocking, SIMS, and spectrometer, respectively. The refractive index increase and the change in lattice constant of the surface layer are noticed during the annealed process.

Paper Details

Date Published: 20 February 1998
PDF: 4 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300653
Show Author Affiliations
Yushan Li, Changchun Institute of Physics (China)
Shaojie Ma, Changchun Institute of Physics (China)
Kunio Tada, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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