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Proceedings Paper

Thin film technologies for micro-opto-electro-mechanical system applications
Author(s): Yi-Xin Chen
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Paper Abstract

The combination of micro-optics and integrated optics with microelectronics and micromechanics to create a broader class of micro-opto-electro-mechanical system (MOEMS), various thin films and related technologies such as the bulk and surface micromachining and LIG technology for the elementary structures and devices of MEOMS are discussed.

Paper Details

Date Published: 20 February 1998
PDF: 8 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300639
Show Author Affiliations
Yi-Xin Chen, Shanghai Jiao Tong Univ. (China)

Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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