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Proceedings Paper

Influence of H2O on structure of base-catalyzed porous SiO2 antireflective coatings
Author(s): Xiaolin Liu; Weiqing Zhang; Yueqin Le; Yongxing Tang; Jinren Sun; Peihui Liang
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Paper Abstract

Silica antireflective coatings were deposited on KB-7 glass substrates by sol-gel method. The sols were produced via ammonia catalysis tetraethylorthosilicate (TEOS) diluted in ethanol, using different molar ratio, R, of H2O/TEOS. The influence of amount of water on structure of coatings was investigated by measuring thickness, refractive index, and infrared spectrum of the coatings and BET surface area of the dried gel silica power. The results revealed that the thickness and the refractive index were decreased with the increase of R, whereas the surface area was increased with the increase of R. The infrared spectra indicated that the densification of coating reduced with increase of R.

Paper Details

Date Published: 20 February 1998
PDF: 4 pages
Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300638
Show Author Affiliations
Xiaolin Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Weiqing Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Yueqin Le, Shanghai Institute of Optics and Fine Mechanics (China)
Yongxing Tang, Shanghai Institute of Optics and Fine Mechanics (China)
Jinren Sun, Shanghai Institute of Optics and Fine Mechanics (China)
Peihui Liang, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3175:
Third International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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