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Proceedings Paper

Amorphous silicon waveguides and interferometers for low-cost silicon optoelectronics
Author(s): Giuseppe Cocorullo; Francesco G. Della Corte; Rosario De Rosa; Ivo Rendina; Alfredo Rubino; Ezio Terzini
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Paper Abstract

The present work reports on our recent achievements in the exploitation of a simple technology for the fabrication of hydrogenated amorphous silicon (a-Si:H) based low-loss rib waveguides. In particular, waveguides with various widths have been fabricated out of an a-SiC:H/a-Si:H stack deposited by plasma enhanced chemical vapor deposition at the relatively low temperature of 220 degrees C. The ribs were defined by an anisotropic, CH4-based, reactive ion etching process. The devices have been subsequently characterized by cut-back technique. Even though a dependence of attenuation parameter on the waveguide width was observed, propagation losses as low as 0.7 dB/cm could be measured at λ=1.3 μm, in good agreement with he theoretical estimations based on the intrinsic absorption of the material. Starting from the same structure, a Fabry- Perot thermo optical modulator has been also fabricated and tested at the communication wavelength of 1.3 μm.

Paper Details

Date Published: 12 January 1998
PDF: 7 pages
Proc. SPIE 3278, Integrated Optic Devices II, (12 January 1998); doi: 10.1117/12.298212
Show Author Affiliations
Giuseppe Cocorullo, Institute of Research on Electromagnetism and Electronic Devices/CNR and Univ. of Calabria (Italy)
Francesco G. Della Corte, Institute of Research on Electromagnetism and Electronic Devices/CNR (Italy)
Rosario De Rosa, ENEA/Ctr. di Portici (Italy)
Ivo Rendina, Institute of Research on Electromagnetism and Electronic Devices/CNR (Italy)
Alfredo Rubino, ENEA/Ctr. di Portici (Italy)
Ezio Terzini, ENEA/Ctr. di Portico (Italy)

Published in SPIE Proceedings Vol. 3278:
Integrated Optic Devices II
Giancarlo C. Righini; S. Iraj Najafi; Bahram Jalali, Editor(s)

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