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Proceedings Paper

Ultra-accurate actuator with long travel
Author(s): Eric Pernette; Reymond Clavel
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Paper Abstract

A new and simple actuator principle is proposed and developed for microassembly. It allows to produce positioning with high resolution on a large motion ranges with the same element. It cumulates the advantages of classical mechanical elements such as linear rolling guides and screw-nut devices driven by DC motors with the elastic structures as guide and demagnification lever. The submicronic positioning is realized in two phases, coarse and fine, each other ensured by the same drive unit. A prototype with one linear DOF has been realized and characterized with a motion range of 45mm, a resolution of 0.1 (Mu) m and a motive force better than 20N. A second prototype with 2DOF X-Y table based on the same principle has also been developed with success, with 0.1micrometers for the resolution and 19mm for the motion range. This paper describes the new actuator principle, the realization and the result of the one and two degrees-of-freedom devices. The last section deals with the integration of this kind of actuator in a 6 degrees-of-freedom parallel structure dedicated to the microassembly of optical components.

Paper Details

Date Published: 1 January 1998
PDF: 12 pages
Proc. SPIE 3202, Microrobotics and Microsystem Fabrication, (1 January 1998); doi: 10.1117/12.298045
Show Author Affiliations
Eric Pernette, Swiss Federal Institute of Technology/Lausanne (Switzerland)
Reymond Clavel, Swiss Federal Institute of Technology/Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 3202:
Microrobotics and Microsystem Fabrication
Armin Sulzmann, Editor(s)

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