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Proceedings Paper

Metamorphosis of laser writer
Author(s): Michael A.I. Wilson
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Paper Abstract

Micronic Laser Systems AB, a developer of laser pattern generator systems based in Sweden, and Align-Rite Limited, a maskmaker based in the United Kingdom, decided in early of 1989 to cooperate on a project intended to utilize Micronic's laser scanner systems and Align-Rite's maskmaking experience to develop a system tailored specifically for 5X reticle manufacture. However, it was also found that the initial design was reliant upon a high degree of engineering support and was not well suited to a production environment. Based on the experience of Align- Rite; modifications were introduced into a prototype system that was installed at Align-Rite, Bridgend for evaluation. Continuing work by Align-Rite and Micronic identified areas where further design and process modifications were required in order to qualify the system as a heavy duty production tool. These changes are incorporated int eh production version of the machine, Micronic LSR-18, that is now being built in Sweden. The presentation intends to give the audience an understanding of the principal features and operational characteristics of the laser pattern generator, to discuss the results achieved thus far, and the process that is being used to generate 5x reticles. Finally, the future path and expectation of the project will be given.

Paper Details

Date Published: 1 March 1991
PDF: 15 pages
Proc. SPIE 1496, 10th Annual Symp on Microlithography, (1 March 1991); doi: 10.1117/12.29749
Show Author Affiliations
Michael A.I. Wilson, Align-Rite Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 1496:
10th Annual Symp on Microlithography
James N. Wiley, Editor(s)

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