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Proceedings Paper

Absolute interferometric calibration of toric and conical surfaces
Author(s): Thomas Bluemel; Karl-Edmund Elssner; Guenter Schulz
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Paper Abstract

Prior to any interferometric surface shape testing, it is necessary to calibrate the interferometer in order to avoid systematic measurement errors. One common calibration method employs a standard specimen which has been previously calibrated by a so-called absolute testing method. Another method is the direct application of absolute testing methods to the interferometer. The authors have in the past developed and used absolute interferometric testing methods to calibrate flat, spherical and cylindrical surfaces, as well as complete interferometers. Now they have developed new methods, suitable also for toric and conical surfaces and the interferometers. The basic principles of the calibration methods are described. The correctness of the methods and the influence which measurement errors have on the results are demonstrated by computer simulation.

Paper Details

Date Published: 1 November 1997
PDF: 9 pages
Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.295139
Show Author Affiliations
Thomas Bluemel, Berliner Institut fuer Optik GmbH (Germany)
Karl-Edmund Elssner, Berliner Institut fuer Optik GmbH (Germany)
Guenter Schulz, Berliner Institut fuer Optik GmbH (Germany)

Published in SPIE Proceedings Vol. 3134:
Optical Manufacturing and Testing II
H. Philip Stahl, Editor(s)

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