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Proceedings Paper

Measurements of the LIGO Pathfinder optics
Author(s): Robert E. Parks; Christopher J. Evans; Paul J. Sullivan; Lianzhen Shao; Bryan E. Loucks
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Paper Abstract

A number of 150 mm apertures in 250 mm diameter plano- concave with departures from the nominal figure of a few nm were carefully tested using phase measuring interferometry and the data reduced using pixel based absolute testing techniques. We discuss some of the data reduction techniques used as well as the precautions taken to verify the accuracy of the result. After accounting for systematic errors introduced by interferometer imaging, we show that the surfaces can be characterized to a few nm peak-to-valley over spatial scales form the measurement aperture to a few mm.

Paper Details

Date Published: 1 November 1997
PDF: 17 pages
Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); doi: 10.1117/12.295122
Show Author Affiliations
Robert E. Parks, National Institute of Standards and Technology and Optical Perspectives Group (United States)
Christopher J. Evans, National Institute of Standards and Technology (United States)
Paul J. Sullivan, National Institute of Standards amd Technology (United States)
Lianzhen Shao, Tucson Optical Research Corp. (United States)
Bryan E. Loucks, Consultant (United States)

Published in SPIE Proceedings Vol. 3134:
Optical Manufacturing and Testing II
H. Philip Stahl, Editor(s)

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