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Proceedings Paper

Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics
Author(s): Timothy Graber; S. Felix Krasnicki; Patricia B. Fernandez; Dennis M. Mills; Qin-Yi Tong; Ulrich M. Goesele
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Paper Abstract

X-ray optical elements (such as single-crystal silicon monochromators) illuminated with high-power synchrotron- radiation beams produced by insertion devices and, to a lesser extent bending magnets, require cooling. When operating a silicon crystal at room temperature, channels for the coolant are often fabricated directly beneath the diffracting surface. Then a separate silicon distribution manifold/plenum is manufactured, and the components are bonded together using an adhesive or some intermediate material. In many cases, such monochromators suffer from strains induced by the bond. A silicon-to-silicon direct- bonding technique (i.e., without any intermediate material) has been developed that appears to be an attractive method for creating a bond with less strain between two pieces of silicon. This technique is well understood for the case of thin wafers (approximately 0.5 mm thickness) and is used by the semiconductor industry. Recently, bonding of 16-mm-thick 10-cm-diameter silicon crystals has been successfully performed inducing very little strain. A short review of the silicon-to-silicon direct-bonding process will be presented with an emphasis on its application to room temperature high-heat-load x-ray optics along with the present status of direct bonding efforts at the APS.

Paper Details

Date Published: 11 December 1997
PDF: 11 pages
Proc. SPIE 3151, High Heat Flux and Synchrotron Radiation Beamlines, (11 December 1997); doi: 10.1117/12.294498
Show Author Affiliations
Timothy Graber, Argonne National Lab. (United States)
S. Felix Krasnicki, Argonne National Lab. (United States)
Patricia B. Fernandez, Argonne National Lab. (United States)
Dennis M. Mills, Argonne National Lab. (United States)
Qin-Yi Tong, Duke Univ. (USA) and Max-Planck Institute of Microstructure Physics (Germany)
Ulrich M. Goesele, Duke Univ. (USA) and Max-Planck Institute of Microstructure Physics (Germany)

Published in SPIE Proceedings Vol. 3151:
High Heat Flux and Synchrotron Radiation Beamlines
Albert T. Macrander; Ali M. Khounsary, Editor(s)

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