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Proceedings Paper

Improved operation of micromechanical comb-drive actuators through the use of a new angled comb-finger design
Author(s): Michel A. Rosa; Sima Dimitrijev; H. Barry Harrison
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Paper Abstract

A new design for the comb finger structures used in micromechanical electrostatic comb-drive actuators is presented. The new angled comb finger design is simulated using finite element analysis techniques and the results compared with hose obtained from the simulation of a conventional rectangular shaped comb finger. Results obtained demonstrate the greater actuation force generation capabilities of the new angled comb finger design. Actuation forces of up to 4.5 times those generated by standard comb finger designs have been obtained. Finally, a design approach has been demonstrated, allowing the successful design of a device based on the use of the new angled comb finger. This technique ensures the stability of the device throughout its operable range of displacements for both micron and sub-micron comb finger gap widths.

Paper Details

Date Published: 14 November 1997
PDF: 7 pages
Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); doi: 10.1117/12.293578
Show Author Affiliations
Michel A. Rosa, Griffith Univ. (Australia)
Sima Dimitrijev, Griffith Univ. (Australia)
H. Barry Harrison, Griffith Univ. (Australia)

Published in SPIE Proceedings Vol. 3242:
Smart Electronics and MEMS
Alex Hariz; Vijay K. Varadan; Olaf Reinhold, Editor(s)

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