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Proceedings Paper

Eddy current microsensor for use in micromachine applications
Author(s): Pei Lin Yu; Ronald B. Zmood
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Paper Abstract

In this paper we investigate an eddy current microsensor which uses a trans-impedance to minimize the influence of stray capacitances on its operation when being used for micromachine applications. The effect of stray capacitances can be minimized when using this type of amplifier by ensuring its input impedance is small. A technique for realizing very low input impedance over a wide bandwidth in these amplifier is studied. In additional new improved circuit configuration which further reduces the amplifier input impedance over a wider range of frequencies is investigated by computer simulation. Finally the experimental investigation of target materials suitable for achieving high sensor sensitivity is discussed.

Paper Details

Date Published: 14 November 1997
PDF: 6 pages
Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); doi: 10.1117/12.293551
Show Author Affiliations
Pei Lin Yu, Royal Melbourne Institute of Technology (Australia)
Ronald B. Zmood, Royal Melbourne Institute of Technology (Australia)

Published in SPIE Proceedings Vol. 3242:
Smart Electronics and MEMS
Alex Hariz; Vijay K. Varadan; Olaf Reinhold, Editor(s)

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