Share Email Print

Proceedings Paper

New type of thermal analyzer with a micro-air-bridge heater
Author(s): Mitsuteru Kimura; Junichi Hayasaka
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Miniaturized sensor for thermal analysis is fabricated using micromachining technique and its fundament al characteristics are obtained. This device fabricated in a Si substrate consists of monolithically integrated components of an air-bridge type microheater, a thin film thermocouple and a sample-holder. Boiling points of liquid samples, water and methanol, are observed in the heating curve and the heating-rate curve, and sudden decrease of the temperature at the dropping time of the liquid samples at room temperature due to the effect of evaporation heat is also observed. Loss of the sample due to the evaporation during heating was theoretically discussed.

Paper Details

Date Published: 14 November 1997
PDF: 8 pages
Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); doi: 10.1117/12.293550
Show Author Affiliations
Mitsuteru Kimura, Tohoku-Gakuin Univ. (Japan)
Junichi Hayasaka, Tohoku-Gakuin Univ. (Japan)

Published in SPIE Proceedings Vol. 3242:
Smart Electronics and MEMS
Alex Hariz; Vijay K. Varadan; Olaf Reinhold, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?