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Proceedings Paper

Simulation of dynamic characteristics of micropumps using PSPICE
Author(s): In-Byeong Kang; Alex Hariz
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Paper Abstract

In this paper, simulation of dynamic characteristics of pneumatically driven micropumps is presented. SPICE was used as a system level simulator. The SPICE model employed equivalent electrical circuit parameters extracted by an energy based calculation method. The thickness, side length of the diaphragm and forward resistance of valves were selected as variable to study the effect of design parameters in the performance of micropumps. Since the flow and pressure response of micropumps are similar to those of a differential electrical circuit, two parameters, namely, maximum amplitude and time constant of the system were used to discuss the simulation results. The results are of fundamental important to the understanding and optimization of the micropump.

Paper Details

Date Published: 14 November 1997
PDF: 7 pages
Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); doi: 10.1117/12.293549
Show Author Affiliations
In-Byeong Kang, Univ. of South Australia (Australia)
Alex Hariz, Univ. of South Australia (Australia)

Published in SPIE Proceedings Vol. 3242:
Smart Electronics and MEMS
Alex Hariz; Vijay K. Varadan; Olaf Reinhold, Editor(s)

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