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Proceedings Paper

Micro membrane vibrator with thermally driven bimorph cantilever beams
Author(s): Chun Chieh Tsao; Wensyang Hsu
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Paper Abstract

A micro membrane vibrator consisting of bimorph cantilever beams and a membrane is designed, fabricated, and tested here. Due to the discrepancy of thermal expansion coefficients between different layers, the membrane moves with temperature change. The four-layer structure including SiO2-polysilicon- insulated SiO2-aluminum is fabricated with four masks. The numerical finite element program ANSYS 51 is used to investigate the behavior of different designs to have larger displacement and force. According to the testing results, we observe that our designs can induce the maximum Z-axis displacement up to 117 micrometer when input power is 6.98 W. The working frequency is about 40 Hz when the amplitude is kept between 2 and 5 micrometer approximately.

Paper Details

Date Published: 14 November 1997
PDF: 11 pages
Proc. SPIE 3241, Smart Materials, Structures, and Integrated Systems, (14 November 1997);
Show Author Affiliations
Chun Chieh Tsao, National Chiao Tung Univ. (Taiwan)
Wensyang Hsu, National Chiao Tung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 3241:
Smart Materials, Structures, and Integrated Systems
Alex Hariz; Vijay K. Varadan; Olaf Reinhold, Editor(s)

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