We describe here a multifunctional plasma diagnostic (MFPD) device being developed by Physical Optics Corporation using interferometry and spectroscopic techniques, along with an intelligent software package. The MFPD can provide a non- contact diagnosis of plasma density profile, temperature profile, and ionic species of plasmas. High-speed data processing is accomplished through automatic data acquisition hardware and an intelligent software package, which contains two major parts: (1) a genetic-algorithm- based, fast-evolved phase profile fitting program, and (2) an intelligent neural network spectral feature recognition and plasma classification routine. The integrated MFPD is user-friendly, real-time, simple to operate, and applicable to industrial environments.

Date Published: 21 November 1997
PDF: 8 pages
Proc. SPIE 3172, Optical Technology in Fluid, Thermal, and Combustion Flow III, (21 November 1997);

Published in SPIE Proceedings Vol. 3172:
Optical Technology in Fluid, Thermal, and Combustion Flow III
Soyoung Stephen Cha; James D. Trolinger; Masaaki Kawahashi, Editor(s)