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Proceedings Paper

Optimization of electrostatic lens systems: fast approximate calculation of the imaging properites of einzel lenses
Author(s): Ralf Degenhardt
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Paper Abstract

An analytical potential model is presented that allows a fast approximate calculation of the imaging properties of einzel lenses. The axial potential of these three-electrode unipotential lenses is approximated by a linear superposition of the potentials of apertures with a circular opening. With adequately defined coefficients of the linear superposition, it is possible to approximate the axial potential of symmetric as well as asymmetric einzel lenses with 'thick' central electrodes. In the optimization process of a transfer optics consisting of five einzel lenses, a comparison with the results obtained by means of the charge density method has proven, that this rather simple potential model is sufficiently accurate to allow a reliable pre-selection of promising lens designs.

Paper Details

Date Published: 25 September 1997
PDF: 8 pages
Proc. SPIE 3155, Charged Particle Optics III, (25 September 1997); doi: 10.1117/12.287814
Show Author Affiliations
Ralf Degenhardt, Fritz-Haber-Institut der Max-Planck-Gesellschaft (Germany)


Published in SPIE Proceedings Vol. 3155:
Charged Particle Optics III
Eric Munro, Editor(s)

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