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Proceedings Paper

Reducing vibration effects in phase-shifting interferometry
Author(s): Leslie L. Deck
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Paper Abstract

A method to reduce the sensitivity of phase-shifting interferometry to external vibrations without sacrificing lateral resolution is described. The returning interferogram is amplitude split to form two series of interferograms; a fast sampled, low spatial resolution data set and a slow sampled, high spatial resolution data set. The fast sampled set is used to calculate the true phase increment between intensity measurements in the high spatial resolution data set and a generalized phase extraction algorithm then uses these phase increments when calculating the topographical phases for this set. The measured topography thereby benefits from the best qualities of both data sets, providing increased vibration immunity without sacrificing high spatial resolution.

Paper Details

Date Published: 25 September 1997
PDF: 11 pages
Proc. SPIE 3100, Sensors, Sensor Systems, and Sensor Data Processing, (25 September 1997); doi: 10.1117/12.287746
Show Author Affiliations
Leslie L. Deck, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 3100:
Sensors, Sensor Systems, and Sensor Data Processing
Otmar Loffeld, Editor(s)

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