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Proceedings Paper

Integrated uncooled array IR sensors
Author(s): Eugeny Ph. Pevtsov; Eugeny G. Elkin; Marina A. Pospelova
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Paper Abstract

Technologies enabling low-dissipation designs for uncooled array IR sensors are offered. The technique involves the etching of special buffer layers from under a 1-micrometers membrane followed by deposition of an IR-sensitive film and electrode structure. The electrical and physical properties of plumbum-zirconate-titanate, barium titanate, tetraaminodiphenyl, polyvinylidene fluoride pyroelectric films are compared. A circuit for sensing pyroelectric signals in a CCD is considered.

Paper Details

Date Published: 11 August 1997
PDF: 4 pages
Proc. SPIE 3200, Third Conference on Photonic Systems for Ecological Monitoring, (11 August 1997); doi: 10.1117/12.284744
Show Author Affiliations
Eugeny Ph. Pevtsov, Moscow State Institute of Radioengineering Electronics and Automation (Russia)
Eugeny G. Elkin, Pulsar Science Research Institute (Russia)
Marina A. Pospelova, Pulsar Science Research Institute (Russia)

Published in SPIE Proceedings Vol. 3200:
Third Conference on Photonic Systems for Ecological Monitoring
Milos Klima; Yuri A. Kuznetsov; Victor A. Shilin, Editor(s)

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