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Proceedings Paper

Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry
Author(s): Ken Nakano; Akihiro Torii; Kazuhiro Hane; Shigeru Okuma
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Paper Abstract

A stroboscopic phase-shift interferometry is applied to visualize the high-frequency microvibration of a surface acoustic wave (SAW) devices quantitatively. The Fizeau-type interferometry is realized with a multi-mode semiconductor laser diode and an optical isolator. With the laser light illuminating stroboscopically, observed interference intensity gives information about average displacements of the vibrations. Distribution of the 50 MHz SAW propagation along the propagation path has been observed. The measured amplitude of the vibration is 3 nm. Repetition accuracy evaluated with the root mean square method is 1.2500 of the laser wavelength. This method is useful for estimating and improving performances of microdevices.

Paper Details

Date Published: 2 September 1997
PDF: 11 pages
Proc. SPIE 3225, Microlithography and Metrology in Micromachining III, (2 September 1997); doi: 10.1117/12.284553
Show Author Affiliations
Ken Nakano, Nagoya Univ. (Japan)
Akihiro Torii, Aichi Institute of Technology (Japan)
Kazuhiro Hane, Tohoku Univ. (Japan)
Shigeru Okuma, Nagoya Univ. (Japan)

Published in SPIE Proceedings Vol. 3225:
Microlithography and Metrology in Micromachining III
Craig R. Friedrich; Akira Umeda, Editor(s)

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