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Proceedings Paper

Computer modeling techniques applied to pneumatically driven micropumps
Author(s): In-Byeong Kang; Noel D. Samaan; Malcolm R. Haskard; Namsoo Kim
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Paper Abstract

In this paper, an analytical approach based on the energy relationship between microcomponents has been applied to derive the characteristics of a square diaphragm silicon micropump to consider its nonlinear effects. The methodology caters for all relevant energy terms corresponding to the stiffness of the diaphragm including bending, tensile, stretch forces, the mass of the diaphragm, and of the air in the vicinity of diaphragm. The stiffness of the pump chamber and the input/output tube, the fluidic mass and the frictional losses of the input/output tube are also incorporated in the model. Equivalent electrical circuit is derived to calculate the lumped parameters using the energy expressions. The approach is applied to the pneumatically driven micropump.

Paper Details

Date Published: 5 September 1997
PDF: 11 pages
Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); doi: 10.1117/12.284522
Show Author Affiliations
In-Byeong Kang, Univ. of South Australia (Australia)
Noel D. Samaan, Univ. of South Australia (Australia)
Malcolm R. Haskard, Univ. of South Australia (Australia)
Namsoo Kim, Chungbuk National Univ. (South Korea)

Published in SPIE Proceedings Vol. 3224:
Micromachined Devices and Components III
Kevin H. Chau; Patrick J. French, Editor(s)

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