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Proceedings Paper

Optical measurement of micromachine engine performance
Author(s): Scott C. Holswade; Fred M. Dickey
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Paper Abstract

Understanding the mechanisms that impact the performance of microelectromechanical systems (MEMS) is essential to the development of optimized designs and drive signals, as well as the qualification of devices for commercial applications. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 micrometers in diameter and can be driven at rotation rates exceeding 300,000 rpm. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. We describe the development of micromachine optical probe (MOP) technology for the evaluation of micromachine performance. The MOP approach is based on the detection of optical signal scattered by the gear teeth or other physical structures. We present experimental results for a prototype system designed to measure engine parameters as well as long term performance data.

Paper Details

Date Published: 5 September 1997
PDF: 10 pages
Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); doi: 10.1117/12.284508
Show Author Affiliations
Scott C. Holswade, Sandia National Labs. (United States)
Fred M. Dickey, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 3224:
Micromachined Devices and Components III
Kevin H. Chau; Patrick J. French, Editor(s)

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