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Proceedings Paper

Micromachining of metals and ceramics by nano- and picosecond laser radiation
Author(s): Juergen Jandeleit; Alexander Horn; Ernst-Wolfgang Kreutz; Reinhart Poprawe
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Paper Abstract

The removal processes of Si3N4- and SiC-ceramics and tungstencarbide were investigated using 40 ps and 10 ns laser pulses. The threshold fluence for removal and the removal rate per pulse were determined. Changes in the chemical composition of the processed surfaces are described and the influence of the removal strategy on the processing results are discussed. Micro-structures were produced in combination with high- resolution optics and precision motion control systems. In SiC-ceramics grooves were produced with geometries smaller than 30 micrometer. In Si3N4-ceramics holes were drilled with diameters smaller than 6 micrometer. The influence of scanning velocity, overlap of the laser pulses and pulse energy on material removal and surface finish were discussed.

Paper Details

Date Published: 5 September 1997
PDF: 9 pages
Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); doi: 10.1117/12.284498
Show Author Affiliations
Juergen Jandeleit, Technische Univ. Aachen (Germany)
Alexander Horn, Technische Univ. Aachen (Germany)
Ernst-Wolfgang Kreutz, Technische Univ. Aachen (Germany)
Reinhart Poprawe, Technische Univ. Aachen (Germany)

Published in SPIE Proceedings Vol. 3223:
Micromachining and Microfabrication Process Technology III
Shih-Chia Chang; Stella W. Pang, Editor(s)

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