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Proceedings Paper

Laser-micromachined microchannel solvent separator
Author(s): Dean W. Matson; Peter M. Martin; Wendy D. Bennett; Donald C. Stewart; John W. Johnston
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Paper Abstract

The fabrication of components for a microchannel chemical solvent separation unit is described. The performance of this unit is intended to employ enhanced kinetic effects due to short contact times encountered in to facilitate extraction of one dissolved species from one solvent into another. Components for the device are fabricated by laser micromachining, photochemical machining, and photolithographic patterning. The separation unit consists of a series of parallel flow and counterflow microchannels separated by micromachined membranes and assembled into a single unit by a lamination process. In a sample design, channel width, membrane width and length are 100 micrometer, 1 cm, and 8 cm respectively. Test membranes were fabricated from stainless steel using photochemical machining and from polyimide by using two distinct laser micromachining processes. Use of the lamination fabrication method allows flexibility in the design of the microchannels within the unit. Preliminary results of membrane tests and a brief discussion of future efforts are included.

Paper Details

Date Published: 5 September 1997
PDF: 7 pages
Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); doi: 10.1117/12.284495
Show Author Affiliations
Dean W. Matson, Pacific Northwest National Lab. (United States)
Peter M. Martin, Pacific Northwest National Lab. (United States)
Wendy D. Bennett, Pacific Northwest National Lab. (United States)
Donald C. Stewart, Pacific Northwest National Lab. (United States)
John W. Johnston, Pacific Northwest National Lab. (United States)

Published in SPIE Proceedings Vol. 3223:
Micromachining and Microfabrication Process Technology III
Shih-Chia Chang; Stella W. Pang, Editor(s)

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