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Proceedings Paper

Assembly of hybrid microsystems in a large-chamber scanning electron microscope by use of mechanical grippers
Author(s): Manfred Weck; Joachim Huemmler; Bernd Petersen
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Paper Abstract

The assembly of hybrid micro systems is usually done by hand with the help of tweezers and optical microscopes. It is obvious, however, that only the automation will lead to an efficient and precise assembly process. This paper describes the design, the function and the application of mechanical grippers for automated micro assembly. These grippers are powered by piezo systems and are able to move their arms in sub-micrometer steps in order to grip micro parts very precisely. They can be equipped with sensors for the detection of gripping force and have been designed especially for use in a large-chamber scanning electron microscope (LC-SEM). Process observation is a main problem in all aspects of micro technology. The LC-SEM allows on-line process observation with a very high depth of focus and a large lateral resolution. It has a 2 m3 vacuum chamber in which complete assembly units can be installed. Furthermore the electron gun is freely movable, so that a sample can be observed from all directions. An additional advantage of this microscope is the clean production environment (vacuum).

Paper Details

Date Published: 5 September 1997
PDF: 7 pages
Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); doi: 10.1117/12.284484
Show Author Affiliations
Manfred Weck, Fraunhofer Institut fuer Produktionstechnologie (Germany)
Joachim Huemmler, Fraunhofer Institut fuer Produktionstechnologie (Germany)
Bernd Petersen, Fraunhofer Institut fuer Produktionstechnologie (Germany)

Published in SPIE Proceedings Vol. 3223:
Micromachining and Microfabrication Process Technology III
Shih-Chia Chang; Stella W. Pang, Editor(s)

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