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Proceedings Paper

Strain effects in multilayers
Author(s): Colin M. A. Ashruf; Patrick J. French; Charles R. de Boer; Pasqualina M. Sarro
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Paper Abstract

High stress levels can cause problems for both electronics and micromechanics. It is therefore important to characterize the stress and strain of the different mechanical layers used for processing. In order to predict the properties of a multilayered structure it is not sufficient to know the mechanical properties of each independent layer. The deposited layers may have a considerable effect on the mechanical properties of the underlying layer. This paper discusses the importance of the effect of each layer on underlying layers and on the total structure, using poly-silicon and silicon- nitride as the mechanical layers. The measurements show that at an anneal of 850 degrees Celsius the influence of nitride on the underlying poly is considerable. At an anneal of 1000 degrees Celsius this effect disappears. We also examined the stress in poly-nitride-poly layers in order to find out the influence of annealing in between the deposition of the layers. Measurements show that the temperature of the anneal is the dominant factor.

Paper Details

Date Published: 5 September 1997
PDF: 11 pages
Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); doi: 10.1117/12.284475
Show Author Affiliations
Colin M. A. Ashruf, Delft Univ. of Technology (Netherlands)
Patrick J. French, Delft Univ. of Technology (Netherlands)
Charles R. de Boer, Delft Univ. of Technology (Netherlands)
Pasqualina M. Sarro, Delft Univ. of Technology (Netherlands)

Published in SPIE Proceedings Vol. 3223:
Micromachining and Microfabrication Process Technology III
Shih-Chia Chang; Stella W. Pang, Editor(s)

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