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Proceedings Paper

Geometrical phase measurement with a Michelson interferometer for microsurface characterization
Author(s): Alexander V. Tavrov; Dmitry V. Ublinsky; Vladimir A. Andreev
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Paper Abstract

There have been many recent manifestations of geometrical phases in optics, but in the majority of publications, both theoretical and experimental. These phases are considered only as some interesting natural phenomena. Nevertheless,the information contained in geometrical phase can be used for constructing the devices capable of measurement both geometrical and optical characteristics of a micro-surface, which combine the properties of profilometer and ellipsometer. The practical aspects of the fundamental theory of geometrical phases in the non-planar 3D- interferometer are applied for a micro-surface measurements. The proposed interpretation allows to consider components of the dynamic phase and the geometric phase separately in an interference pattern. This concept provides the following micro-object characterization: refractive index, extinction ration, pixel planar angles, polarization optical constants. In order to identify the geometric phases the ellipsometer techniques are applied and a spatial distribution of the Jone's matrix is calculated. The measurement procedure is developed for the anisotropic objects as well. The role of the geometric phases is rather important when a high magnification mode of the interferometer is adjusted.

Paper Details

Date Published: 3 October 1997
PDF: 4 pages
Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); doi: 10.1117/12.283871
Show Author Affiliations
Alexander V. Tavrov, Nanotech Co. Ltd. (Russia)
Dmitry V. Ublinsky, Nanotech Co. Ltd. (Russia)
Vladimir A. Andreev, P.N. Lebedev Physical Institute (Russia)

Published in SPIE Proceedings Vol. 3121:
Polarization: Measurement, Analysis, and Remote Sensing
Dennis H. Goldstein; Russell A. Chipman, Editor(s)

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