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Proceedings Paper

Infrared micromachined Fabry-Perot interferometer
Author(s): Cazimir-Gabriel Bostan; A. Corici; S. Nan; P. Obreja
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Paper Abstract

In this paper a Fabry-Perot interferometer fabricated by silicon surface micromachining is presented. The interferometer can be optimized for a wavelength of 1.3 micrometer, to act as an electro-mechanical modulator for fiber-optic network communications (fiber-in-the-loop applications), or for a range of wavelength from 1.5 - 7.5 micrometer, to act as a filter for IR spectroscopy in an IR gas analyzer.

Paper Details

Date Published: 22 September 1997
PDF: 4 pages
Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); doi: 10.1117/12.281347
Show Author Affiliations
Cazimir-Gabriel Bostan, Univ. of Bucharest (Romania)
A. Corici, R&D National Institute for Microtechnology (Romania)
S. Nan, R&D National Institute for Microtechnology (Romania)
P. Obreja, R&D National Institute for Microtechnology (Romania)


Published in SPIE Proceedings Vol. 3110:
10th Meeting on Optical Engineering in Israel
Itzhak Shladov; Stanley R. Rotman, Editor(s)

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