Share Email Print
cover

Proceedings Paper

Integrated optical sources for microsystems
Author(s): Joerg Mueller
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Integrated optical wide band sources based on thermal and plasma emitters are expected to find broad applications in optical microsystems, e.g. for medical and experimental analysis. Presently only few designs have been investigated in spite of their promising properties with respect to low power consumption, high modulation frequencies, and self adjusting geometries. This paper presents on presently known designs, their fabrication technologies, and applicability e.g. to micro total analysis systems ((mu) tas). KHz- modulation for tungsten and polysilicon based thermal emitters for the near infrared and visible spectrum at powers in the milliwatt-range are obtained. Plasma emitters driven by DC-, RF- or (mu) W-generators work at powers as low as a few milliwatts and emit in the UV and visible spectrum. They can be used as light sources as well as e.g. directly as specimen specific plasma detectors in micro total analysis systems.

Paper Details

Date Published: 24 September 1997
PDF: 7 pages
Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281217
Show Author Affiliations
Joerg Mueller, Technische Univ. Hamburg-Harburg (Germany)


Published in SPIE Proceedings Vol. 3099:
Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications
Olivier M. Parriaux; Ernst-Bernhard Kley; Brian Culshaw; Magnus Breidne, Editor(s)

© SPIE. Terms of Use
Back to Top