Share Email Print
cover

Proceedings Paper

Polymerized PMMA replication of micro-optics elements
Author(s): Lin Pang; Lurong Guo; Bo Chen; Hongjun Zeng; Jin Zhang
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A new method for replicating microoptics elements is presented. The principle and technological process of the method are introduced. For PMMA, deep binary relief gratings on quartz substrate and parabolic lenses array in gelatin on glass substrate are replicated by using this new method. The relief-transfer efficiency and transparency of the replicas are measured. The results show that the replicas are of high fidelity of profile.

Paper Details

Date Published: 24 September 1997
PDF: 8 pages
Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); doi: 10.1117/12.281216
Show Author Affiliations
Lin Pang, Sichuan Univ. (China)
Lurong Guo, Sichuan Univ. (China)
Bo Chen, Sichuan Univ. (China)
Hongjun Zeng, Sichuan Univ. (China)
Jin Zhang, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 3099:
Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications
Olivier M. Parriaux; Ernst-Bernhard Kley; Brian Culshaw; Magnus Breidne, Editor(s)

© SPIE. Terms of Use
Back to Top