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Proceedings Paper

Microellipsometric surface measurement
Author(s): Jochen Doberitzsch; Wolfgang Holzapfel; Ulrich Neuschaefer-Rube
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Paper Abstract

Surface measurement is an important tool for quality control In our contribution we describe a novel application of reflection ellipsometry to profile measurement and material detection. The ellipsometric parameters (Delta) and (Psi) are measured by using a PSA-ellipsometer arrangement and a 4- zone-intensity-ellipsometric algorithm. To achieve a high lateral resolution we focus the laser beam on the surface through a microscope objective with high numerical aperture. The spot diameter is in the order to 1 micrometers . The focus adjustment is carried out by an integrated autofocus system. From the ellipsometric parameters we conclude to the refractive index of the local surface material and the local surface gradients. The height profile is calculated by an integrating and filtering algorithm. The material is ascertained form the refractive index. The feasibility of our novel microellipsometric measurement system is demonstrated by several tests. Measurements of material transitions and the height profile of a glass surface standard are presented.

Paper Details

Date Published: 17 September 1997
PDF: 8 pages
Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); doi: 10.1117/12.281152
Show Author Affiliations
Jochen Doberitzsch, Univ. of Kassel (Germany)
Wolfgang Holzapfel, Univ. of Kassel (Germany)
Ulrich Neuschaefer-Rube, Univ. of Kassel (Germany)

Published in SPIE Proceedings Vol. 3098:
Optical Inspection and Micromeasurements II
Christophe Gorecki, Editor(s)

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