Share Email Print

Proceedings Paper

Excimer-laser-assisted deposition of diamondlike carbon hard coatings
Author(s): Mao-Kuo Wei; Angelika Popp; Adolf Lang; Karsten Schutte; Hans Wilhelm Bergmann
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Diamond-like carbon (DLC) films were deposited using the excimer laser assisted physical vapor deposition at room temperature. The films deposited at high vacuum (10-5 mbar) revealed more diamond-like character than under other atmospheres of argon and hydrogen. DLC- films can be deposited with a thickness more than 1 micrometers with the help of either an additional Ti-buffer layer or an in-situ laser treatment during the deposition. The adhesion of the films was qualitatively determined by using the indentation and bending tests. Additionally, the adhesion was found to be dependent on the power densities for the target ablation (IT) and for the in-situ laser treatment (IS), as well as, on the applied buffer layer. The roughness was found to be proportional to the film thickness at various surface morphologies of the substrate. The friction coefficient of DLC-films against steel (100Cr6) was found to be approximately 0.1 and the wear loss of the films was dependent on the properties of substrate material.

Paper Details

Date Published: 18 August 1997
PDF: 13 pages
Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); doi: 10.1117/12.281108
Show Author Affiliations
Mao-Kuo Wei, ATZ-EVUS (Germany)
Angelika Popp, ATZ-EVUS (Germany)
Adolf Lang, ATZ-EVUS (Germany)
Karsten Schutte, ATZ-EVUS (Germany)
Hans Wilhelm Bergmann, ATZ-EVUS (Germany)

Published in SPIE Proceedings Vol. 3097:
Lasers in Material Processing
Leo H. J. F. Beckmann, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?