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Proceedings Paper

Comparison of different optical proximity correction models with three-dimensional photolithography simulation over planar substrates
Author(s): Juan C. Rey; Jiangwei Li; Victor V. Boksha; Douglas A. Bernard
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Paper Abstract

Different models for model-based Optical Proximity Correction have been recently developed for improving the printability of IC designs. Each model has its own area of application and it can be verified by experiments or by using a calibrated photoresist simulator that can predict 3D shapes with enough accuracy and acceptable performance. In this work we describe the use of 3D photoresist simulation for exposure, post-exposure bake and development on planar substrates to study the characteristics of different models for model-based OPC. We also introduce a new OPC tool that it is based on an automated procedure for layout modification and fast 3D simulation of exposure, PEB and development.

Paper Details

Date Published: 14 August 1997
PDF: 14 pages
Proc. SPIE 3183, Microlithographic Techniques in IC Fabrication, (14 August 1997); doi: 10.1117/12.280553
Show Author Affiliations
Juan C. Rey, Technology Modeling Associates, Inc. (United States)
Jiangwei Li, Technology Modeling Associates, Inc. (United States)
Victor V. Boksha, Technology Modeling Associates, Inc. (United States)
Douglas A. Bernard, Technology Modeling Associates, Inc. (United States)

Published in SPIE Proceedings Vol. 3183:
Microlithographic Techniques in IC Fabrication
Soon Fatt Yoon; Raymond Yu; Chris A. Mack, Editor(s)

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